CHA Cryopump Regeneration

• Switch off LN2 CONTROL.
• Wait approximately 6 hours for cold trap to become warm.
• Switch off ion gauges.
• Place system in "standby" (hi-vac valve closed) at Auto-Tech II control.
• Turn key to "regen" on cryopump control.
• Wait until cryopump control “regen” LED starts flashing.
• (may be beneficial to extend heating time by not going to next step for up to 4-5 hours).
• Turn key to "auto" on cryopump control.
• Wait for “CP On” and “Cold Relay” LEDs to light on cryopump control (regeneration completed).
• Switch “on” LN2 CONTROL.
• Switch on ion gauges.
• Place system in "start" (hi-vac valve open) at Auto-Tech II control.

Note: CHA can perform evaporations during the cold trap warming, but pump-down time will increase significantly.