LPS USE |
MANUFACTURER |
MODEL |
SERIAL |
CATALOG |
CAPACITY1 |
RECOMMENDED OIL 2 |
LPS OIL |
|
House |
Busch |
RC0025.C406.1101 |
D24557 |
|
1.0 qt. |
SAE 30W non-detergent @ |
TKO19 3 |
|
Spare |
Busch |
RC0025.E506.1101 |
E37379 |
|
1.4 qt. |
SAE 30W non-detergent @ |
TKO19 3 |
|
Oxford RIE |
Edwards |
E2M40 |
8311 |
|
3.5 L |
E15 E17 @ |
|
Fomblin 06/6 * |
Oxford RIE (not used) |
Edwards |
E2M40 |
9752FF |
|
3.5 L |
K1506 @ |
F06/6 @ |
Fomblin 06/6 * |
Matrix Asher |
Edwards |
E2M40FSPX |
3816 |
|
3.5 L |
E15 E17 @ |
|
Fomblin 06/6 * |
Spare |
Edwards |
E2M80FF |
3022 |
|
4.01 L |
E15 E17 @ |
|
Fomblin 06/6 * |
Oxford PECVD |
Edwards Mech. Booster |
EH500 |
00386FF |
|
1.63 L |
F06/6 @ |
F16/6 + |
Fomblin 06/6 * |
Veeco Thermal Evap. |
Edwards Speedivac |
ED660 |
none |
|
|
E Ultragrade19 * |
TKO19 4 |
|
Oxford RIE |
Leybold Ruvac |
WA250 |
1285220526M |
89511-1 |
|
HE200 # |
|
Fomblin 14/6 * |
Plasmtherm ICP |
Leybold Trivac |
D16A |
L961201833 |
898033 |
1.25 qt. |
HE175 # |
|
TKO19 5 |
Plasmatherm ICP |
Leybold Trivac |
D40BCS |
L961201801 |
720-75-013 |
2.7 qt. |
HE1600 @ |
F14/6 % |
Fomblin 14/6 * |
Plasmatherm RIE |
Leybold Trivac |
D40BCS |
L961202182 |
720-75-013 |
2.7 qt. |
HE1600 @ |
F14/6 % |
Fomblin 14/6 * |
Spare |
Leybold Trivac |
D60A |
1287334087 |
898053 |
4.0 qt. |
HE175 # |
|
Fomblin 14/6 * |
Spare |
Leybold Trivac |
D60AC |
1288064373E |
898097 |
4.0 qt. |
HE200 # |
|
Fomblin 14/6 * |
Oxford RIE |
Leybold Trivac |
D90AC |
1286043068 |
301796-1001 |
|
HE200 # |
|
Fomblin 14/6 * |
Spare |
Alcatel |
2063A |
330431 |
|
7 L |
|
|
TKO19 |
CHA Ebeam Evap. |
Alcatel |
2063A |
296725 |
|
7 L |
|
|
TKO19 |
Oxford HDPECVD |
Alcatel |
2063-C2 |
362732 |
|
7 L |
A113 @ |
|
Fomblin 25/6 @ |
Oxford HDPECVD |
Alcatel |
2015-C2 |
362259 |
|
1 L |
A113 @ |
|
Fomblin 25/6 @ |
Spare |
Leybold Trivac |
D40BCS |
L991301609 |
91389-2 |
2.5 L |
HE1600 @ |
|
Fomblin 14/6 |
Spare |
Leybold Ruvac |
WSU251US |
91723A871100003 |
|
|
|
|
Fomblin 14/6 |
Spare |
Edwards Mech. Booster |
EH-250 |
8227 |
|
2 L |
|
F 06/6 @ |
Fomblin 06/6@ |
NOTES |
BRAND |
SPEC. SOURCE |
CONVERSION |
1.Capacity often varies within a model number by serial number and type of oil. Capacities listed may not reflect actual specification. |
F = Fomblin |
@ Manual at LPS |
1 kg Fomblin = 0.56 qt. = 2.203 lb. |
2. Oil column includes hydrocarbon, synthetic, and PFPE type lubricants. |
K = Krytox |
+ Internet |
1 qt. = 1.788 kg Fomblin = 3.934 lb. |
3. Hydrocarbon in use at LPS. Busch specifies their R530/R570/R590. |
E = Edwards |
% 3rd party vendor rep. |
1 gal. = 7.153 kg Fomblin = 15.738 lb. |
4. Hydrocarbon in use at LPS. Edwards specifies Fomblin 06/6 for PFPE. |
HE = Leybold |
# On Pump |
|
5. Hydrocarbon in use at LPS. Leybold specifies Fomblin 14/6 for PFPE. |
B = Busch |
* Manufacturer Technician |
|
|
A = Alcatel |
|
|
|
L = Lesker |
|
|
|
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