LPS USE

MANUFACTURER

MODEL

SERIAL

CATALOG

CAPACITY1

RECOMMENDED OIL 2

LPS OIL

 

House

 

Busch

RC0025.C406.1101

D24557

 

1.0 qt.

SAE 30W non-detergent @

TKO19  3

Spare

Busch

RC0025.E506.1101

E37379

 

1.4 qt.

SAE 30W non-detergent @

TKO19 3

Oxford RIE

Edwards

E2M40

8311

 

3.5 L

E15 E17 @

 

Fomblin 06/6 *

Oxford RIE

(not used)

Edwards

E2M40

9752FF

 

3.5 L

K1506 @

F06/6 @

Fomblin 06/6 *

Matrix Asher

Edwards

E2M40FSPX

3816

 

3.5 L

E15 E17 @

 

Fomblin 06/6 *

Spare

Edwards

E2M80FF

3022

 

4.01 L

E15 E17 @

 

Fomblin 06/6 *

Oxford PECVD

Edwards Mech. Booster

EH500

00386FF

 

1.63 L

F06/6 @

F16/6 +

Fomblin 06/6 *

Veeco Thermal Evap.

Edwards Speedivac

ED660

none

 

 

E Ultragrade19 *

TKO19 4

Oxford RIE

Leybold Ruvac

WA250

1285220526M

89511-1

 

HE200 #

 

Fomblin 14/6 *

Plasmtherm ICP

Leybold Trivac

D16A

L961201833

898033

1.25 qt.

HE175 #

 

TKO19 5

Plasmatherm ICP

Leybold Trivac

D40BCS

L961201801

720-75-013

2.7 qt.

HE1600 @

F14/6 %

Fomblin 14/6 *

Plasmatherm RIE

Leybold Trivac

D40BCS

L961202182

720-75-013

2.7 qt.

HE1600 @

F14/6 %

Fomblin 14/6 *

Spare

Leybold Trivac

D60A

1287334087

898053

4.0 qt.

HE175 #

 

Fomblin 14/6 *

Spare

Leybold Trivac

D60AC

1288064373E

898097

4.0 qt.

HE200 #

 

Fomblin 14/6 *

Oxford RIE

Leybold Trivac

D90AC

1286043068

301796-1001

 

HE200 #

 

Fomblin 14/6 *

Spare

Alcatel

2063A

330431

 

7 L

 

 

TKO19

CHA Ebeam Evap.

 Alcatel

 2063A

 296725

 

7 L

 

 

TKO19

Oxford HDPECVD

Alcatel

2063-C2

362732

 

7 L

A113 @

 

Fomblin 25/6 @

Oxford HDPECVD

Alcatel

2015-C2

362259

 

1 L

A113 @

 

Fomblin 25/6 @

Spare

Leybold Trivac

D40BCS

L991301609

91389-2

2.5 L

HE1600 @

 

Fomblin 14/6

Spare

Leybold Ruvac

WSU251US

91723A871100003

 

 

 

 

Fomblin 14/6

Spare

Edwards Mech. Booster

EH-250

8227

 

2 L

 

F 06/6 @

Fomblin 06/6@

 

NOTES

BRAND

SPEC. SOURCE

CONVERSION

1.Capacity often varies within a model number by serial number and type of oil. Capacities listed may not reflect actual specification.

F = Fomblin

@ Manual at LPS

1 kg Fomblin = 0.56 qt. = 2.203 lb.

2. Oil column includes hydrocarbon, synthetic, and PFPE type lubricants.

K = Krytox

+ Internet

1 qt. = 1.788 kg Fomblin = 3.934 lb.

3. Hydrocarbon in use at LPS. Busch specifies their R530/R570/R590.

E = Edwards

% 3rd party vendor rep.

1 gal. = 7.153 kg Fomblin = 15.738 lb.

4. Hydrocarbon in use at LPS. Edwards specifies Fomblin 06/6 for PFPE.

HE = Leybold

# On Pump

 

5. Hydrocarbon in use at LPS. Leybold specifies Fomblin 14/6 for PFPE.

B = Busch

* Manufacturer Technician

 

 

A = Alcatel

 

 

 

L = Lesker

 

 

 

INERT FLUID

FOMBLIN EQUIVALENT

Alcatel 113

Fomblin 25/6

Edwards 1506

Fomblin 06/6

Krytox 1506

Fomblin 06/6

Krytox 1514

Fomblin 14/6

Krytox 1525

Fomblin 25/6

Leybold 1600

Fomblin 14/6

HYDROCARBON FLUID

LESKER EQUIVALENT

Alcatel 100

TKO-19

Alcatel 200

Diffoil-20

Alcatel 300

TKO-W/7

Edwards 16

TKO-19

Edwards 20

Diffoil-20

Edwards Supergrade A

TKO-19+

Edwards TW

TKO-w/7

Inland 19

TKO-19

Inland 21

TKO-19+

Inland TW

TKO-W/7

Inland Invoil 20

Diffoil-20

Leybold HE175

TKO-19

Leybold HE200

Diffoil-20

Leybold HE270

Diffoil-20

Leybold HE400

TKO-W/7

PUMP

TYPE

FOMBLIN OIL

Edwards

Rotary

Fomblin 06/6

 

Roots

Fomblin 14/6

Leybold

Rotary

Fomblin 14/6

 

Roots

Fomblin 06/6

Alcatel

Rotary

Fomblin 25/6