HEATPULSE 610 RAPID THERMAL ANNEALER

Additional figures are at the end of this article.

• SAFETY
• Toxic arsenic vapor is generated by heating of GaAs.
• Internal chamber components can be extremely hot.
• DO NOT OPERATE ABOVE 800º.
• STARTUP
• Startup executable = C:\AG\PCAT.EXE
• RTA Panel : POWER switch "OFF".
• Computer : "ON".
• Open manual valve on wall to start nitrogen.
• Open manual valve on wall to start forming gas (20% H₂ in N₂).
• RTA Panel : Set the PURGE FLOWMETER (20 % H₂ in N₂) to 20.
• RTA Panel : Set METER SELECT switch to "TEMP".
• RTA Panel : Set PYRO/TC switch to "TC".
• RTA Panel : Set LAMP CONTROL switch to "AUTO".
• RTA Chamber : Load clean sample(s) on silicon support wafer.
• RTA Chamber : Purge with process gasses for 3+ minutes before starting the process recipe.
• RTA Panel : POWER switch "ON". Contactor engagement produces a strong clunk-like sound.
• SPECIFY CONTROL SOFTWARE RECIPE
• Computer : "READ RECIPE".
• Computer : "EXECUTE RECIPE".
• Computer : Check the Steady State (SS), Ramp, and Delay (Dly) parameters.
• RUN THE PROCESS
• Computer : "RUN RECIPE".
• Computer : Monitor process, noting temperature over/under shoots and any other problems in the RTA logbook. Every run must be entered into the logbook.
• At the end of process, continue purging with gasses to evacuate toxic gasses before opening the chamber door.
• Wait until the temperature cools to 100^oC before opening the chamber door.
• With the door fully open, wait until the temperature is below 70^oC before unloading the sample(s).
• SHUTDOWN
• RTA Panel : POWER switch "OFF".
• Close manual valve on wall to stop forming gas (H₂ in N₂).
• Close manual valve on wall to stop nitrogen.
• NOTES
• Disregard decimal in the front panel LED meter.
• Emissivity switch (thumbwheels) are for PYRO temperature control mode, not TC mode.
• Password for editing processes is "AGA".
• Please do not operate above 800º.

Example recipe parameter file for Au/Ge alloying:

 
ACTION TIME sec TEMP C N2 Ar/H2
------ -------- ------- -- -----
Dly 10 0 ON ON
Ramp 10 300 ON ON
SS 60 300 ON ON
Ramp 10 400 ON ON
SS 40 400 ON ON
Ramp 50 50 ON  ON
Dly 120 0 ON ON