| Instrument | Serial Number |
| AGA Heatpulse 610 RTA | 1B8056 |
| CHA Mark 40C Evaporator | 1339-21911 |
| GCA DSW 4800 Stepper | 480035 |
| Matrix S102 Stripper | 2147 |
| Olympus MX50AF Microscope | 9C00920 |
| Oxford 100ICP HDPECVD | 219671 |
| Oxford microP DP | SF7-9071 |
| Oxford microP RIE | SF7-9074 |
| Plasmatherm 700SLR ICP | PTI-75096F |
| Plasmatherm 790 RIE | PTI-78220F |
| Suss HR-100 Scriber | 997 |
| Suss MJB3-HP-IR Contact Aligner | 2225R |
| Tencor Alphastep 200 | 1288-1633 |
| Tencor Alphastep 500 | 6990586 |
| MDA System 16 | 1375 |
| MDA System 16 | 1625 |