Spin On Glass

Allied Signal 512

• Cured Film Thickness = 4600 - 5200 Å

SOG Application:
Remove SOG from refrigerator a day before use to prevent water condensation upon opening bottle.

• Clean sample.
• Spin SOG: 2K rpm - 60 sec.
• Return SOG bottle to refrigerator.
• Hotplate Bake: 90^oC - 60 sec.
• Hotplate Bake: 150^oC - 60 sec.
• Hotplate Bake: 250^oC - 60 sec.
• Furnace Cure: process "SOG1"
  • Set gas flowmeter to 10.
  • Pre-heat furnace to 250^oC by setting temperature controller.
  • Place sample into furnace tube.
  • Run computer control process "SOG1".
    • Ramp up 250-400^oC for 10 minutes.
    • Steady-state at 400^oC for 30 minutes.
    • Ramp down 400-250^oC for 10 minutes.
  • Remove sample from furnace tube.
  • Set gas flowmeter to 2.

• At Plasmatherm RIE 790 using graphite plate:
  • Dry run (no sample) process "SOGETCH" for 2 minutes to condition chamber.
  • Run (with sample) process "SOGETCH" for 30 seconds.
  • Inspect sample with microscope to determine if additional etching is necessary.
    • Repeat etch-inspect until SOG is cleared from feature(s).
• After etching, run RIE process "ARCHAMBER" to clean chamber for the longer of twice the total run times or 10 minutes.